The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing the fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography etching cleaning thin film deposition and polishing. The handbook of chemicals and gases for the semiconductor industry meets this need each of the handbooks eight chapters is related to a specific area of semiconductor processing the authors provide a brief overview of each step in the process followed by tables containing physical properties handling safety and other pertinent information on chemicals and gases typically used in these . The handbook of chemicals and gases for the semiconductor industry is a convenient source of information on the properties applications and health and safety considerations of the chemicals used in these processes each of the online handbooks eight sections is related to a specific area of semiconductor processing. Title handbook of chemicals gases for the semi conductor industry author learncabgctsnetorg monika richter 2020 12 13 21 37 46 subject handbook of chemicals gases for the semi conductor industry